We have developed a 50-W average-power KrF excimer laser with a pulse width of 480 fs by using the method of gated gain amplification at a 200-Hz repetition rate.
© 2001 Optical Society of America
(140.2180) Lasers and laser optics : Excimer lasers
(140.3280) Lasers and laser optics : Laser amplifiers
(140.3610) Lasers and laser optics : Lasers, ultraviolet
(140.7090) Lasers and laser optics : Ultrafast lasers
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
Y. Nabekawa, D. Yashitomi, T. Sekikawa, and S. Watanabe, "50-W average-power, 480-fs KrF excimer laser with gated gain amplification," Opt. Lett. 26, 807-809 (2001)