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Optics Letters

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  • Vol. 26, Iss. 11 — Jun. 1, 2001
  • pp: 807–809

50-W average-power, 480-fs KrF excimer laser with gated gain amplification

Y. Nabekawa, D. Yashitomi, T. Sekikawa, and S. Watanabe  »View Author Affiliations


Optics Letters, Vol. 26, Issue 11, pp. 807-809 (2001)
http://dx.doi.org/10.1364/OL.26.000807


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Abstract

We have developed a 50-W average-power KrF excimer laser with a pulse width of 480 fs by using the method of gated gain amplification at a 200-Hz repetition rate.

© 2001 Optical Society of America

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(140.3280) Lasers and laser optics : Laser amplifiers
(140.3610) Lasers and laser optics : Lasers, ultraviolet
(140.7090) Lasers and laser optics : Ultrafast lasers
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers

Citation
Y. Nabekawa, D. Yashitomi, T. Sekikawa, and S. Watanabe, "50-W average-power, 480-fs KrF excimer laser with gated gain amplification," Opt. Lett. 26, 807-809 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-11-807


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