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Optics Letters

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  • Vol. 26, Iss. 15 — Aug. 1, 2001
  • pp: 1200–1202

Efficient high-order diffraction of extreme-ultraviolet light and soft x-rays by nanostructured volume gratings

D. Hambach, G. Schneider, and E. M. Gullikson  »View Author Affiliations


Optics Letters, Vol. 26, Issue 15, pp. 1200-1202 (2001)
http://dx.doi.org/10.1364/OL.26.001200


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Abstract

We report what is believed to be the first demonstration that volume gratings diffract extreme-ultraviolet light (EUV) or soft x-rays into high orders approximately an order of magnitude more efficiently than predicted by classical thin-grating theory. At the 13-nm wavelength, copolymer grating structures with 200-nm period and aspect ratios of ~10:1 achieved diffraction efficiencies of 11.2%, 15.3%, 11.5%, and 9.1% in the orders m of 2, 3, 4, and 5, respectively. In addition, the measured transmission spectra are consistent with electrodynamic calculations by coupled-wave theory. High-order diffraction can now be employed for substantially improved diffractive EUV and x-ray optics, e.g., highly resolving diffractive lenses and large-aperture condensers.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(050.2770) Diffraction and gratings : Gratings
(340.7460) X-ray optics : X-ray microscopy

Citation
D. Hambach, G. Schneider, and E. M. Gullikson, "Efficient high-order diffraction of extreme-ultraviolet light and soft x-rays by nanostructured volume gratings," Opt. Lett. 26, 1200-1202 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-15-1200


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References

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