OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 26, Iss. 15 — Aug. 1, 2001
  • pp: 1200–1202

Efficient high-order diffraction of extreme-ultraviolet light and soft x-rays by nanostructured volume gratings

D. Hambach, G. Schneider, and E. M. Gullikson  »View Author Affiliations

Optics Letters, Vol. 26, Issue 15, pp. 1200-1202 (2001)

View Full Text Article

Acrobat PDF (125 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We report what is believed to be the first demonstration that volume gratings diffract extreme-ultraviolet light (EUV) or soft x-rays into high orders approximately an order of magnitude more efficiently than predicted by classical thin-grating theory. At the 13-nm wavelength, copolymer grating structures with 200-nm period and aspect ratios of ~10:1 achieved diffraction efficiencies of 11.2%, 15.3%, 11.5%, and 9.1% in the orders m of 2, 3, 4, and 5, respectively. In addition, the measured transmission spectra are consistent with electrodynamic calculations by coupled-wave theory. High-order diffraction can now be employed for substantially improved diffractive EUV and x-ray optics, e.g., highly resolving diffractive lenses and large-aperture condensers.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(050.2770) Diffraction and gratings : Gratings
(340.7460) X-ray optics : X-ray microscopy

D. Hambach, G. Schneider, and E. M. Gullikson, "Efficient high-order diffraction of extreme-ultraviolet light and soft x-rays by nanostructured volume gratings," Opt. Lett. 26, 1200-1202 (2001)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. J. Kirz, J. Opt. Soc. Am. 74, 301 (1974).
  2. G. Schneider, Appl. Phys. Lett. 71, 2242 (1997).
  3. N. M. Ceglio, A. M. Hawryluk, D. G. Stearns, M. Kuhne, and P. Muller, Opt. Lett. 13, 267 (1988).
  4. G. Schneider, T. Schliebe, and H. Aschoff, J. Vac. Sci. Technol. B 13, 2809 (1995).
  5. D. Hambach and G. Schneider, J. Vac. Sci. Technol. B 17, 3212 (1999).
  6. T. K. Gaylord and M. G. Moharam, Proc. IEEE 73, 894 (1995).
  7. B. L. Henke, and E. M. Gullikson, J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
  8. J. H. Underwood and E. M. Gullikson, J. Electron. Spectrosc. Relat. Phenom. 92, 265 (1998).
  9. M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited