Micromachined silicon nitride deformable mirrors for focus control
Optics Letters, Vol. 26, Issue 16, pp. 1280-1282 (2001)
http://dx.doi.org/10.1364/OL.26.001280
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Abstract
We have built a 1000μm-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(220.1000) Optical design and fabrication : Aberration compensation
(220.2560) Optical design and fabrication : Propagating methods
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics
Citation
Phillip A. Himmer, David L. Dickensheets, and Robert A. Friholm, "Micromachined silicon nitride deformable mirrors for focus control," Opt. Lett. 26, 1280-1282 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-16-1280
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