OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 26, Iss. 21 — Nov. 1, 2001
  • pp: 1642–1644

Antireflection microstructures fabricated upon fluorine-doped SiO2 films

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano  »View Author Affiliations


Optics Letters, Vol. 26, Issue 21, pp. 1642-1644 (2001)
http://dx.doi.org/10.1364/OL.26.001642


View Full Text Article

Acrobat PDF (183 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Two-dimensional periodic structures were fabricated upon a fluorine-doped SiO2 film in which the fluorine content changed gradually in the direction of film thickness. The films were deposited by plasma-enhanced chemical-vapor deposition. The film was periodically patterned into a 1-μm period and an ~1-μm -groove depth by inductive coupled plasma reactive-ion etching followed by chemical etching in a diluted HF solution. A surface reflectance of 0.7% was attained at 1.85-μm wavelength, a value that is one fifth as large as the 3.5% Fresnel reflection of a SiO2 substrate with a flat surface.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(160.6030) Materials : Silica
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.4000) Optical devices : Microstructure fabrication
(310.1210) Thin films : Antireflection coatings

Citation
K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, "Antireflection microstructures fabricated upon fluorine-doped SiO2 films," Opt. Lett. 26, 1642-1644 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-21-1642

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited