OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 26, Iss. 22 — Nov. 15, 2001
  • pp: 1752–1754

Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching

Mikael Karlsson, Klas Hjort, and Fredrik Nikolajeff  »View Author Affiliations


Optics Letters, Vol. 26, Issue 22, pp. 1752-1754 (2001)
http://dx.doi.org/10.1364/OL.26.001752


View Full Text Article

Acrobat PDF (173 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The transfer of continuous-relief diffractive structures from resist into diamond by use of direct-write electron-beam lithography followed by dry etching in an inductively coupled plasma is demonstrated. The gases used for the diamond etching are O2 and Ar. The chemical-vapor-deposited diamond substrate is of optical quality. Our results show that the transfer process generates fairly smooth etched structures. Blazed gratings with periods of 45μm and Fresnel lenses have been manufactured. The blazed gratings have been optically evaluated with a femtosecond laser operating at 400 nm. The diffraction efficiency was 68% in the first order, with a theoretical value of 100%. We intend to investigate the transfer process further and then to fabricate diffractive and refractive elements for use with Nd:YAG high-power lasers.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(160.6000) Materials : Semiconductor materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics

Citation
Mikael Karlsson, Klas Hjort, and Fredrik Nikolajeff, "Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching," Opt. Lett. 26, 1752-1754 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-22-1752

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited