Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery
Optics Letters, Vol. 26, Issue 23, pp. 1873-1875 (2001)
http://dx.doi.org/10.1364/OL.26.001873
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Abstract
We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.
© 2001 Optical Society of America
OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy
Citation
A. Dubois, L. Vabre, and A. C. Boccara, "Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery," Opt. Lett. 26, 1873-1875 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-23-1873
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