We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.
© 2001 Optical Society of America
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy
A. Dubois, L. Vabre, and A. C. Boccara, "Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery," Opt. Lett. 26, 1873-1875 (2001)