OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 26, Iss. 23 — Dec. 1, 2001
  • pp: 1873–1875

Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery

A. Dubois, L. Vabre, and A. C. Boccara  »View Author Affiliations

Optics Letters, Vol. 26, Issue 23, pp. 1873-1875 (2001)

View Full Text Article

Acrobat PDF (400 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.

© 2001 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy

A. Dubois, L. Vabre, and A. C. Boccara, "Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery," Opt. Lett. 26, 1873-1875 (2001)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. B. Bhushan, J. C. Wyant, C. L. Koliopoulos, Appl. Opt. 24, 1489 (1985).
  2. M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Pro. SPIE 775, 233 (1987).
  3. S. S. C. Chim G. S. Kino, Appl. Opt. 30, 2197 (1991).
  4. K. Creath, in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1988), Vol. 26, pp. 349–393.
  5. D. C. Ghiglia M. D. Pritt, Two-Dimensional Phase Unwrapping, Theory, Algorithms, and Software (Wiley-Interscience, New York, 1998).
  6. K. D. Stumpf, Opt. Eng. 18, 648 (1979).
  7. J. C. Wyant, Appl. Opt. 14, 2622 (1975).
  8. O. Sasaki, H. Okazaki, M. Sakai, Appl. Opt. 26, 1089 (1987).
  9. A. Dubois, J. Opt. Soc. Am. 18, 1972 (2001).
  10. F. R. Tolmon J. G. Wood, J. Sci. Instrum. 33, 236 (1956).
  11. K. Creath, Appl. Opt. 28, 333 (1989).
  12. G. Schulz K.-E. Elssner, Appl. Opt. 30, 4500 (1991).
  13. C. J. R. Sheppard K. G. Larkin, Appl. Opt. 34, 4731 (1995).
  14. A. Dubois, J. Selb, L. Vabre, A. C. Boccara, Appl. Opt. 39, 2323 (2000).
  15. K. Creath J. C. Wyant, Appl. Opt. 29, 3823 (1990).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited