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Optics Letters

Optics Letters

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  • Vol. 26, Iss. 23 — Dec. 1, 2001
  • pp: 1873–1875

Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery

A. Dubois, L. Vabre, and A. C. Boccara  »View Author Affiliations


Optics Letters, Vol. 26, Issue 23, pp. 1873-1875 (2001)
http://dx.doi.org/10.1364/OL.26.001873


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Abstract

We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.

© 2001 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy

Citation
A. Dubois, L. Vabre, and A. C. Boccara, "Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery," Opt. Lett. 26, 1873-1875 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-23-1873


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References

  1. B. Bhushan, J. C. Wyant, C. L. Koliopoulos, Appl. Opt. 24, 1489 (1985).
  2. M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Pro. SPIE 775, 233 (1987).
  3. S. S. C. Chim G. S. Kino, Appl. Opt. 30, 2197 (1991).
  4. K. Creath, in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1988), Vol. 26, pp. 349–393.
  5. D. C. Ghiglia M. D. Pritt, Two-Dimensional Phase Unwrapping, Theory, Algorithms, and Software (Wiley-Interscience, New York, 1998).
  6. K. D. Stumpf, Opt. Eng. 18, 648 (1979).
  7. J. C. Wyant, Appl. Opt. 14, 2622 (1975).
  8. O. Sasaki, H. Okazaki, M. Sakai, Appl. Opt. 26, 1089 (1987).
  9. A. Dubois, J. Opt. Soc. Am. 18, 1972 (2001).
  10. F. R. Tolmon J. G. Wood, J. Sci. Instrum. 33, 236 (1956).
  11. K. Creath, Appl. Opt. 28, 333 (1989).
  12. G. Schulz K.-E. Elssner, Appl. Opt. 30, 4500 (1991).
  13. C. J. R. Sheppard K. G. Larkin, Appl. Opt. 34, 4731 (1995).
  14. A. Dubois, J. Selb, L. Vabre, A. C. Boccara, Appl. Opt. 39, 2323 (2000).
  15. K. Creath J. C. Wyant, Appl. Opt. 29, 3823 (1990).

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