OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 26, Iss. 23 — Dec. 1, 2001
  • pp: 1888–1890

Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction

Kevin K. Lee, Desmond R. Lim, Lionel C. Kimerling, Jangho Shin, and Franco Cerrina  »View Author Affiliations


Optics Letters, Vol. 26, Issue 23, pp. 1888-1890 (2001)
http://dx.doi.org/10.1364/OL.26.001888


View Full Text Article

Acrobat PDF (163 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate 0.8-dB/cm transmission loss for a single-mode, strip Si/SiO2 waveguide with submicrometer cross-sectional dimensions. We compare the conventional waveguide-fabrication method with two smoothing technologies that we have developed, oxidation smoothing and anisotropic etching. We observe significant reduction of sidewall roughness with our smoothing technologies, which directly results in reduced scattering losses. The rapid increase in the scattering losses as the waveguide dimension is miniaturized, as seen in conventionally fabricated waveguides, is effectively suppressed in the waveguides made with our smoothing technologies. In the oxidation smoothing case, the loss is reduced from 32 dB/cm for the conventional fabrication method to 0.8 dB/cm for the single-mode waveguide width of 0.5 µm . This is to our knowledge the smallest reported loss for a high-index-difference system such as a Si/SiO2 strip waveguide.

© 2001 Optical Society of America

OCIS Codes
(230.7370) Optical devices : Waveguides
(290.5880) Scattering : Scattering, rough surfaces

Citation
Kevin K. Lee, Desmond R. Lim, Lionel C. Kimerling, Jangho Shin, and Franco Cerrina, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-23-1888

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited