What is believed to be the first planar optical waveguide was formed in BiB<sub>3</sub>O<sub>6</sub> (BIBO) crystal by 2.8-MeV He<sup>+</sup>-ion implantation with a dose of 2×10<sup>16</sup>ions/cm <sup>2</sup> and 2.8-MeV P<sup>+</sup>-ion implantation with a dose of 1×10<sup>14</sup>ions/cm <sup>2</sup> at room temperature. We observed 21 darks modes for the He<sup>+</sup>-ion-implanted BIBO waveguides and four dark modes for the P<sup>+</sup>-ion-implanted waveguides. The refractive-index profile of the He<sup>+</sup>-implanted BIBO waveguide was analyzed. The data also suggest that the BIBO waveguides formed by MeV He<sup>+</sup>-ion and P<sup>+</sup>-ion implantation differ in their developing mechanisms.
© 2001 Optical Society of America
Feng Chen, Hui Hu, Ke-Ming Wang, Bing Teng, Ji-Yang Wang, Qing-Ming Lu, and Ding-Yu Shen, "Formation of a planar optical waveguide by mega-electron-volt He+ and P+ ions implanted in a BiB3O6 crystal," Opt. Lett. 26, 1993-1995 (2001)