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Optics Letters

Optics Letters


  • Vol. 26, Iss. 3 — Feb. 1, 2001
  • pp: 125–127

MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength

C. Montcalm, S. Bajt, and J. F. Seely  »View Author Affiliations

Optics Letters, Vol. 26, Issue 3, pp. 125-127 (2001)

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A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.

© 2001 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(310.6860) Thin films : Thin films, optical properties
(340.7470) X-ray optics : X-ray mirrors

C. Montcalm, S. Bajt, and J. F. Seely, "MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength," Opt. Lett. 26, 125-127 (2001)

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  9. J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

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