MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength
Optics Letters, Vol. 26, Issue 3, pp. 125-127 (2001)
http://dx.doi.org/10.1364/OL.26.000125
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Abstract
A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(310.6860) Thin films : Thin films, optical properties
(340.7470) X-ray optics : X-ray mirrors
Citation
C. Montcalm, S. Bajt, and J. F. Seely, "MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength," Opt. Lett. 26, 125-127 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-3-125
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