Abstract

A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating’s normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with $2400 \mathrm{grooves}/\mathrm{mm}$ and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.

© 2001 Optical Society of America

High-efficiency MoRu–Be multilayer-coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range

John F. Seely, Claude Montcalm, Sherry Baker, and Saša Bajt
Appl. Opt. 40(31) 5565-5574 (2001)

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter
Appl. Opt. 36(31) 8206-8213 (1997)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm

Benjawan Sae-Lao, Saša Bajt, Claude Montcalm, and John F. Seely
Appl. Opt. 41(13) 2394-2400 (2002)

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)