We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10μm -diameter channels in a 100μm -thick silica slab).
© 2001 Optical Society of America
(140.3440) Lasers and laser optics : Laser-induced breakdown
(160.6030) Materials : Silica
(220.4610) Optical design and fabrication : Optical fabrication
(230.4000) Optical devices : Microstructure fabrication
Andrius Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa, and Junji Nishii, "Femtosecond laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279 (2001)