OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 26, Iss. 5 — Mar. 1, 2001
  • pp: 277–279

Femtosecond laser-assisted three-dimensional microfabrication in silica

Andrius Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa, and Junji Nishii  »View Author Affiliations


Optics Letters, Vol. 26, Issue 5, pp. 277-279 (2001)
http://dx.doi.org/10.1364/OL.26.000277


View Full Text Article

Acrobat PDF (116 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10μm -diameter channels in a 100μm -thick silica slab).

© 2001 Optical Society of America

OCIS Codes
(140.3440) Lasers and laser optics : Laser-induced breakdown
(160.6030) Materials : Silica
(220.4610) Optical design and fabrication : Optical fabrication
(230.4000) Optical devices : Microstructure fabrication

Citation
Andrius Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa, and Junji Nishii, "Femtosecond laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-5-277

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited