We introduce a new variant of spectral interferometry, using spectrally dispersed ultrafast laser pulses and quadrature detection to measure optical thickness variations related to surface structure. We can resolve surface features with depths of 3 mm to 25 nm, using a lateral resolution of ~100μm . Quadrature detection gives a larger dynamic range and solves the sign ambiguity problem. This method has potential applications in device manufacture, optical communications, and error compensation in pulse shaping.
© 2001 Optical Society of America
Feng Huang, Weiguo Yang, and Warren S. Warren, "Quadrature spectral interferometric detection and pulse shaping," Opt. Lett. 26, 382-384 (2001)