We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to ±5 nm or less.
© 2001 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
Min-Cheol Park and Seung-Woo Kim, "Compensation of phase change on reflection in white-light interferometry for step height measurement," Opt. Lett. 26, 420-422 (2001)