OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 27, Iss. 10 — May. 15, 2002
  • pp: 821–823

Measurement of surface features beyond the diffraction limit with an imaging ellipsometer

Qiwen Zhan and James R. Leger  »View Author Affiliations


Optics Letters, Vol. 27, Issue 10, pp. 821-823 (2002)
http://dx.doi.org/10.1364/OL.27.000821


View Full Text Article

Acrobat PDF (500 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report a sensitive surface and feature measurement technique that uses a novel imaging ellipsometer. Polarization signatures from unresolved subwavelength structures are utilized as a sensitive measure of linewidth. A focused beam rigorous coupled wave analysis method is developed to simulate the polarization effects from isolated subwavelength structures. Experimental results show that this technique can accurately measure linewidths down to 100 nm with an imaging system whose diffraction-limited resolution is 500 nm. The accuracy of our measurements is ~10 nm for lines that are broader than 100 nm.

© 2002 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(070.6110) Fourier optics and signal processing : Spatial filtering
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry

Citation
Qiwen Zhan and James R. Leger, "Measurement of surface features beyond the diffraction limit with an imaging ellipsometer," Opt. Lett. 27, 821-823 (2002)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-27-10-821


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. B. K. Minhas, S. A. Coulombe, S. S. H. Naqvi, and J. R. McNeil, Appl. Opt. 37, 5112 5115 (1998).
  2. X. Wang, J. Mason, M. Latta, T. Strand, D. Marx, and D. Psaltis, J. Opt. Soc. Am. A 18, 565 (2001).
  3. J. M. Leng, J. Chen, J. Fanton, M. Senko, K. Ritz, and J. Opsal, Thin Solid Films 313–314, 308 (1998).
  4. K. Otaki, H. Osawa, H. Ooki, and J. Saito, Jpn. J. Appl. Phys. 39, 698 (2000).
  5. M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. 72, 1385 (1982).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited