Waveguide Bragg gratings were fabricated by plasma-enhanced chemical-vapor deposition followed by irradiation with KrF excimer laser light through a phase mask. The period of the Bragg grating was 0.53 μm, and the Bragg wavelength was ~1.53 μm . The temperature dependence of the Bragg wavelength was 11 pm/°C for a 10GeO<sub>2</sub> –90SiO<sub>2</sub>(mol.%) core waveguide on a Si substrate, and the Bragg wavelength shift was successfully reduced to 5.0pm/°C by use of a 14GeO<sub>2</sub>–12B<sub>2</sub>O<sub>3</sub>–74SiO<sub>2</sub> (mol.%) core and a crystallized glass substrate with a thermal-expansion coefficient of -2.0×10<sup>-6</sup>(/°C) .
© 2002 Optical Society of America
(050.2770) Diffraction and gratings : Gratings
(130.2790) Integrated optics : Guided waves
(130.3130) Integrated optics : Integrated optics materials
(160.2750) Materials : Glass and other amorphous materials
(230.7380) Optical devices : Waveguides, channeled
Kenji Kintaka, Junji Nishii, Yasushi Kawamoto, Akihiko Sakamoto, and Peter G. Kazansky, "Temperature sensitivity of Ge-B-SiO2 waveguide Bragg gratings on a crystallized glass substrate," Opt. Lett. 27, 1394-1396 (2002)