Applying the principle of differential confocal microscopy to wide-field optically sectioning microscopy, we develop a noninterferometric optical profilometer without scanning mechanisms. Depth resolution of 2 nm is achieved with a power-regulated tungsten-halogen lamp as the light source and a 14-bit CCD camera as the detector. The effects of inhomogeneous surface reflectivity are removed from topographic measurements by arithmetic division. The whole system can be constructed on a single silicon chip for use as a miniaturized optical profiler.
© 2002 Optical Society of America
(100.3010) Image processing : Image reconstruction techniques
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(180.6900) Microscopy : Three-dimensional microscopy
Chau-Hwang Lee, Hong-Yao Mong, and Wan-Chen Lin, "Noninterferometric wide-field optical profilometry with nanometer depth resolution," Opt. Lett. 27, 1773-1775 (2002)