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Optics Letters

Optics Letters


  • Vol. 27, Iss. 24 — Dec. 15, 2002
  • pp: 2212–2214

Normal-incidence reflectance of optimized W /B4 C x-ray multilayers in the range 1.4 nm < l > 2.4 nm

David L. Windt, Eric M. Gullikson, and Christopher C. Walton  »View Author Affiliations

Optics Letters, Vol. 27, Issue 24, pp. 2212-2214 (2002)

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We have fabricated W/B4C multilayers having periods in the range d = 0.8–1.2 nm and measured their soft-x-ray performance near normal incidence in the wavelength range 1.4<l<2.4 nm . By adjusting the fractional layer thickness of W we have produced structures having interface widths ó ~ 0.29 nm (i.e., as determined from normal-incidence reflectometry), thus having optimal soft-x-ray performance. We describe our results and discuss their implications, particularly with regard to the development of short-wavelength normal-incidence x-ray optics.

© 2002 Optical Society of America

OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings
(340.7470) X-ray optics : X-ray mirrors

David L. Windt, Eric M. Gullikson, and Christopher C. Walton, "Normal-incidence reflectance of optimized W /B4 C x-ray multilayers in the range 1.4 nm < l > 2.4 nm," Opt. Lett. 27, 2212-2214 (2002)

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