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Optics Letters

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  • Vol. 27, Iss. 24 — Dec. 15, 2002
  • pp: 2212–2214

Normal-incidence reflectance of optimized W /B4 C x-ray multilayers in the range 1.4 nm < l > 2.4 nm

David L. Windt, Eric M. Gullikson, and Christopher C. Walton  »View Author Affiliations


Optics Letters, Vol. 27, Issue 24, pp. 2212-2214 (2002)
http://dx.doi.org/10.1364/OL.27.002212


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Abstract

We have fabricated W/B4C multilayers having periods in the range d = 0.8–1.2 nm and measured their soft-x-ray performance near normal incidence in the wavelength range 1.4<l<2.4 nm . By adjusting the fractional layer thickness of W we have produced structures having interface widths ó ~ 0.29 nm (i.e., as determined from normal-incidence reflectometry), thus having optimal soft-x-ray performance. We describe our results and discuss their implications, particularly with regard to the development of short-wavelength normal-incidence x-ray optics.

© 2002 Optical Society of America

OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings
(340.7470) X-ray optics : X-ray mirrors

Citation
David L. Windt, Eric M. Gullikson, and Christopher C. Walton, "Normal-incidence reflectance of optimized W /B4 C x-ray multilayers in the range 1.4 nm < l > 2.4 nm," Opt. Lett. 27, 2212-2214 (2002)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-27-24-2212


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References

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  9. The validity of relating interface width parameter s (used in the modified Fresnel formalism to describe the x-ray reflectance data) to a precise physical description of the interface remains to be determined comprehensively, particularly when s is comparable to the layer thickness. Nevertheless, even in multilayers that locally have large interface widths or discontinuous layers, we find s to be a useful parameter with which to quantify the interface width and to compare multilayers and multilayer systems.
  10. J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, Rev. Sci. Instrum. 67, 3372 (1996).
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