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Coherent micromirror arrays

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Abstract

A one-dimensional, spatial light phase modulator consists of a coherent array of programmable micromirrors. Each micromirror has rotation as well as elevation control to permit high-fidelity, piecewise linear approximations to a desired spatial phase profile. We demonstrate programmable, coherent spatial modulation by configuring a four-micromirror array to act as a blazed diffraction grating, showing five diffraction orders. In sharp contrast, adjustment of each mirror elevation converts the grating into the equivalent of a single, large tilted mirror that reflects only in a new specular direction. Higher-order diffraction is effectively suppressed.

© 2002 Optical Society of America

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