The surface laser-induced damage threshold (LIDT) of CsLiB<sub>6</sub>O<sub>10</sub> (CLBO) crystal was enhanced twofold with improved crystallinity and ion-beam etching. For crystals with high crystal quality (bulk LIDT, 15.0–19.0 GW/cm<sup>2</sup>), the surface LIDT was 1.4-fold higher than for those with conventional crystal quality (bulk LIDT, 9.0–12.0 GW/cm<sup>2</sup>). In addition, removal of residual surface-polishing compounds by means of ion-beam etching can further enhance the surface LIDT by another 1.5-fold. Thus, CLBO crystals with high crystal quality and ion-beam etching are now more reliable for high-power UV light generation.
© 2002 Optical Society of America
T. Kamimura, S. Fukumoto, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, "Enhancement of CsLiB6O10 surface-damage resistance by improved crystallinity and ion-beam etching," Opt. Lett. 27, 616-618 (2002)