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Optics Letters

Optics Letters


  • Vol. 28, Iss. 12 — Jun. 15, 2003
  • pp: 1043–1045

Femtosecond laser fabrication of nanostructures in silica glass

R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum  »View Author Affiliations

Optics Letters, Vol. 28, Issue 12, pp. 1043-1045 (2003)

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A femtosecond laser beam focused inside fused silica and other glasses can modify the refractive index of the glass. Chemical etching and atomic-force microscope studies show that the modified region can have a sharp-tipped cone-shaped structure with a tip diameter as small as 100 nm. Placing the structure near the bottom surface of a silica glass sample and applying a selective chemical etch to the bottom surface produces clean, circular, submicrometer-diameter holes. Holes spaced as close to one another as 1.4 μm are demonstrated.

© 2003 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(140.3440) Lasers and laser optics : Laser-induced breakdown
(320.7110) Ultrafast optics : Ultrafast nonlinear optics

R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Femtosecond laser fabrication of nanostructures in silica glass," Opt. Lett. 28, 1043-1045 (2003)

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