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Optics Letters

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  • Vol. 28, Iss. 13 — Jul. 1, 2003
  • pp: 1144–1146

Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser

Ya Cheng, Koji Sugioka, Katsumi Midorikawa, Masashi Masuda, Koichi Toyoda, Masako Kawachi, and Kazuhiko Shihoyama  »View Author Affiliations


Optics Letters, Vol. 28, Issue 13, pp. 1144-1146 (2003)
http://dx.doi.org/10.1364/OL.28.001144


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Abstract

We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties.

© 2003 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(270.4180) Quantum optics : Multiphoton processes
(350.3390) Other areas of optics : Laser materials processing

Citation
Ya Cheng, Koji Sugioka, Katsumi Midorikawa, Masashi Masuda, Koichi Toyoda, Masako Kawachi, and Kazuhiko Shihoyama, "Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser," Opt. Lett. 28, 1144-1146 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-13-1144


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