OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 28, Iss. 14 — Jul. 15, 2003
  • pp: 1263–1265

Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback

J. M. Dawson, L. Wang, P. Famouri, and L. A. Hornak  »View Author Affiliations


Optics Letters, Vol. 28, Issue 14, pp. 1263-1265 (2003)
http://dx.doi.org/10.1364/OL.28.001263


View Full Text Article

Acrobat PDF (1749 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present modeling and experimental results from the use of a 1310-nm-wavelength through-wafer optical microprobe in conjunction with a microstructure grating to monitor the motion of a lateral comb resonator stage. The optical signal that results from shuttle interaction with the microprobe beam exhibits a peak-to-valley dynamic range that corresponds to 2-µm microstructure displacement, facilitating submicrometer positional resolution on digitization. This signal was used to achieve microstructure positional feedback and effective microsystem model parameter extraction, which are essential for structure control and model-based fault detection.

© 2003 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(130.0130) Integrated optics : Integrated optics

Citation
J. M. Dawson, L. Wang, P. Famouri, and L. A. Hornak, "Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback," Opt. Lett. 28, 1263-1265 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-14-1263

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited