The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region of 9.5–15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+ . In the region of importance for extreme-ultraviolet lithography around 13.4 nm, the strongest lines were identified as 4d8–4d75p transitions in Xe10+ . The identifications were made by use of energy parameters extrapolated along the isoelectronic sequence.
© 2003 Optical Society of America
(220.3740) Optical design and fabrication : Lithography
(260.7200) Physical optics : Ultraviolet, extreme
(300.6210) Spectroscopy : Spectroscopy, atomic
(300.6320) Spectroscopy : Spectroscopy, high-resolution
(300.6540) Spectroscopy : Spectroscopy, ultraviolet
Sergei Churilov, *Yogi N. Joshi, and †Joseph Reader, "High-resolution spectrum of xenon ions at 13.4 nm," Opt. Lett. 28, 1478-1480 (2003)