High-resolution spectrum of xenon ions at 13.4 nm
Optics Letters, Vol. 28, Issue 16, pp. 1478-1480 (2003)
http://dx.doi.org/10.1364/OL.28.001478
Acrobat PDF (248 KB)
Abstract
The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region of 9.5–15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+ . In the region of importance for extreme-ultraviolet lithography around 13.4 nm, the strongest lines were identified as 4d8–4d75p transitions in Xe10+ . The identifications were made by use of energy parameters extrapolated along the isoelectronic sequence.
© 2003 Optical Society of America
OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(260.7200) Physical optics : Ultraviolet, extreme
(300.6210) Spectroscopy : Spectroscopy, atomic
(300.6320) Spectroscopy : Spectroscopy, high-resolution
(300.6540) Spectroscopy : Spectroscopy, ultraviolet
Citation
Sergei Churilov, *Yogi N. Joshi, and †Joseph Reader, "High-resolution spectrum of xenon ions at 13.4 nm," Opt. Lett. 28, 1478-1480 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-16-1478
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Cross sections of photoionization and ac Stark shift measured from Doppler-free B ← X(0, 0) excitation spectra of CO (JOSAB)
- Revised and extended analysis of seven-times-ionized cesium: Cs VIII (JOSAB)
- Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region (OL)
- Mo/Si and Mo/Be Multilayer Thin Films on Zerodur Substrates for Extreme-Ultraviolet Lithography (AO)
- High-resolution study of xenon autoionization using direct vacuum-ultraviolet laser excitation (JOSAB)
Related Conference Papers
- Optically induced spin orientation of the nitrogen-vacancy center in diamond
- Optically induced spin orientation of the nitrogen-vacancy center in diamond
- An optical frequency standard with ultracold calcium atoms
- UV and VUV High Resolution Fourier Transform Spectroscopy: Laboratory Atomic Spectroscopy for Astrophysics Applications
- UV and VUV High Resolution Fourier Transform Spectroscopy: Laboratory Atomic Spectroscopy for Astrophysics Applications
- High Resolution UV Photoabsorption Cross Sections of SO2at 198 K, 213 - 325 nm
« Previous Article | Next Article »
OSA is a member of 