OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 28, Iss. 17 — Sep. 1, 2003
  • pp: 1534–1536

Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy

Pascal Mercère, Philippe Zeitoun, Mourad Idir, Sébastien Le Pape, Denis Douillet, Xavier Levecq, Guillaume Dovillaire, Samuel Bucourt, Kenneth A. Goldberg, Patrick P. Naulleau, and Senajith Rekawa  »View Author Affiliations


Optics Letters, Vol. 28, Issue 17, pp. 1534-1536 (2003)
http://dx.doi.org/10.1364/OL.28.001534


View Full Text Article

Acrobat PDF (972 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report, for the first time to our knowledge, experimental demonstration of wave-front analysis via the Hartmann technique in the extreme ultraviolet range. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7- and 0.6-μm -diameter pinholes. To fully characterize the sensor, accuracy and sensitivity measurements were performed. The incident beam’s wavelength was varied from 7 to 25 nm. Measurements of accuracy better than λEUV/120 (0.11 nm) were obtained at λEUV=13.4 nm . The aberrations introduced by an additional thin mirror, as well as wave front of the spatially unfiltered incident beam, were also measured.

© 2003 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.3740) Optical design and fabrication : Lithography
(260.7200) Physical optics : Ultraviolet, extreme

Citation
Pascal Mercère, Philippe Zeitoun, Mourad Idir, Sébastien Le Pape, Denis Douillet, Xavier Levecq, Guillaume Dovillaire, Samuel Bucourt, Kenneth A. Goldberg, Patrick P. Naulleau, and Senajith Rekawa, "Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy," Opt. Lett. 28, 1534-1536 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-17-1534


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. P. P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Boker, Appl. Opt. 38, 7252 (1999).
  2. K. Medecki, E. Tejnil, K. A. Goldberg, and J. Bokor, Opt. Lett. 21, 1526 (1996).
  3. K. A. Goldberg, Ph.D. dissertation (University of California, Berkeley, 1997).
  4. E. Tejnil, K. A. Goldberg, S. H. Lee, H. Medecki, P. J. Batson, P. E. Denham, A. A. MacDowell, and J. Bokor, J. Vac. Sci. Technol. B 15, 2455 (1997).
  5. W. H. Southwell, J. Opt. Soc. Am. 70, 998 (1980).
  6. D. Attwood, P. P. Naulleau, K. A. Goldberg, E. Tejnil, C. Chang, R. Beguiristain, P. Batson, J. Bokor, E. M. Gullikson, M. Koike, H. Medecki, and J. H. Underwood, IEEE Quantum Electron. 35, 709 (1999).
  7. D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation—Principles and Applications (Cambridge U. Press, Cambridge, England, 1999).
  8. Imagine Optics, patent PCT/FR02/02495 (July 2002).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited