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Optics Letters

Optics Letters


  • Vol. 28, Iss. 17 — Sep. 1, 2003
  • pp: 1573–1575

Volume growth initiated by point-to-point ultraviolet-laser direct writing in hybrid solgel glass for three-dimensional microfabrication

Weixing Yu and X.-C. Yuan  »View Author Affiliations

Optics Letters, Vol. 28, Issue 17, pp. 1573-1575 (2003)

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Volume-growth solgel glass acting as self-developing material is used for three-dimensional (3D) fabrication of micro-optical elements. The solgel glass is exposed to a focused laser beam (λ=325 nm) , and surface corrugation is created as a result of surface expansion in the exposed area. The profile depth is related to the laser beam intensity, which is controlled by an acousto-optic modulator, which makes it possible to fabricate 3D structures in the material. Preliminary results show that the controllable volume-growth effect will be of considerable use for production of 3D micro-optical elements with excellent surface smoothness in solgel materials.

© 2003 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(160.4670) Materials : Optical materials
(160.6060) Materials : Solgel
(220.4000) Optical design and fabrication : Microstructure fabrication

Weixing Yu and X.-C. Yuan, "Volume growth initiated by point-to-point ultraviolet-laser direct writing in hybrid solgel glass for three-dimensional microfabrication," Opt. Lett. 28, 1573-1575 (2003)

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