A digital phase-shifting interferometer with a liquid-crystal-display coupled, parallel aligned, nematic liquid-crystal spatial light modulator is developed. The optical phase shift in the Michelson-type polarization interferometer is achieved by a digital phase shift of a grating displayed on the spatial light modulator. Accurate experimental results of using the heterodyne system for π/2 phase steps were demonstrated. A phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shift was achieved.
© 2003 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(230.3720) Optical devices : Liquid-crystal devices
Youichi Bitou, "Digital phase-shifting interferometer with an electrically addressed liquid-crystal spatial light modulator," Opt. Lett. 28, 1576-1578 (2003)