A digital phase-shifting interferometer with a liquid-crystal-display coupled, parallel aligned, nematic liquid-crystal spatial light modulator is developed. The optical phase shift in the Michelson-type polarization interferometer is achieved by a digital phase shift of a grating displayed on the spatial light modulator. Accurate experimental results of using the heterodyne system for π/2 phase steps were demonstrated. A phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shift was achieved.

© 2003 Optical Society of America

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