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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 28, Iss. 21 — Nov. 1, 2003
  • pp: 2109–2111

Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls

Po Shan Chan, H. K. Tsang, and C. Shu  »View Author Affiliations


Optics Letters, Vol. 28, Issue 21, pp. 2109-2111 (2003)
http://dx.doi.org/10.1364/OL.28.002109


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Abstract

We describe how focused-ion-beam (FIB) etching of slanted rib waveguide walls can be used to modify the differential group delay in a waveguide and introduce TE to TM mode conversion in a silicon-on-insulator rib waveguide. We achieved mode conversion by modifying the geometric cross section of a single-mode rib by FIB trimming. Waveguides with different lengths of 45° slant angle rib waveguide walls were fabricated and characterized. We measured the differential group delays and the mode conversion achieved for waveguides with different lengths of a FIB-trimmed slanted rib wall.

© 2003 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.7370) Optical devices : Waveguides
(260.0260) Physical optics : Physical optics
(260.1440) Physical optics : Birefringence

Citation
Po Shan Chan, H. K. Tsang, and C. Shu, "Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls," Opt. Lett. 28, 2109-2111 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-21-2109

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