Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls
Optics Letters, Vol. 28, Issue 21, pp. 2109-2111 (2003)
http://dx.doi.org/10.1364/OL.28.002109
Acrobat PDF (653 KB)
Abstract
We describe how focused-ion-beam (FIB) etching of slanted rib waveguide walls can be used to modify the differential group delay in a waveguide and introduce TE to TM mode conversion in a silicon-on-insulator rib waveguide. We achieved mode conversion by modifying the geometric cross section of a single-mode rib by FIB trimming. Waveguides with different lengths of 45° slant angle rib waveguide walls were fabricated and characterized. We measured the differential group delays and the mode conversion achieved for waveguides with different lengths of a FIB-trimmed slanted rib wall.
© 2003 Optical Society of America
OCIS Codes
(230.0230) Optical devices : Optical devices
(230.7370) Optical devices : Waveguides
(260.0260) Physical optics : Physical optics
(260.1440) Physical optics : Birefringence
Citation
Po Shan Chan, H. K. Tsang, and C. Shu, "Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls," Opt. Lett. 28, 2109-2111 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-21-2109
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Broadband monolithic acousto-optic tunable filter (OL)
- Bidimensional planar micro-optics for optochemical absorbance sensing (OL)
- Dip-Coated Thin-Film Polycarbonate Optical Waveguides (AO)
- Gaussian beams in hollow metal waveguides (JOSAA)
- Transfer matrix for treating stratified media including birefringent crystals (AO)
Related Conference Papers
- Causality and Kramers-Kronig Relations for Waveguides
- Causality and Kramers-Kronig Relations for Waveguides
- Off the Beaten Path with Total Internal Reflection
- Analysis of Leaky Optical Waveguides Using Pseudospectral Methods
- Improved Method for Two-Dimensional Determination of the Magnitude and Orientation of Weak Birefringence
« Previous Article | Next Article »
OSA is a member of 