We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.
© 2003 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(220.4840) Optical design and fabrication : Testing
Hyun-Ho Lee, Jang-Hoon You, and Seung-Han Park, "Phase-shifting lateral shearing interferometer with two pairs of wedge plates," Opt. Lett. 28, 2243-2245 (2003)