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Optics Letters

Optics Letters


  • Vol. 28, Iss. 24 — Dec. 15, 2003
  • pp: 2494–2496

14.5% near-normal incidence reflectance of Cr Sc x-ray multilayer mirrors for the water window

Fredrik Eriksson, Göran A. Johansson, Hans M. Hertz, Eric M. Gullikson, Ulrich Kreissig, and Jens Birch  »View Author Affiliations

Optics Letters, Vol. 28, Issue 24, pp. 2494-2496 (2003)

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Cr/Sc multilayer mirrors, synthesized by ion-assisted magnetron sputter deposition, are proved to have a high near-normal reflectivity of R=14.5% at a grazing angle of 87.5° measured at the wavelength λ=3.11 nm , which is an improvement of more than 31% compared with previously published results. Elastic recoil detection analyses show that the mirrors contained as much as 15 at. % of N and traces of C and O. Soft x-ray reflectivity simulations reveal interface widths of σ=0.34 nm and an exceptionally small layer thickness drift of ~1.6×10-5 nm/multilayer period throughout the stack. Simulations show that a reflectivity of R=25.6% is attainable if impurities and layer thickness drift can be eliminated. The abrupt interfaces are achieved with ion assistance with a low ion energy of 24 eV and high ion-to-metal flux ratios of 7.1 and 23.1 during Cr and Sc sputter deposition, respectively. In addition, a near-normal incidence reflectivity of 5.5% for the C VI emission line (λ=3.374 nm) from a laser plasma source was verified.

© 2003 Optical Society of America

OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings
(340.7470) X-ray optics : X-ray mirrors

Fredrik Eriksson, Göran A. Johansson, Hans M. Hertz, Eric M. Gullikson, Ulrich Kreissig, and Jens Birch, "14.5% near-normal incidence reflectance of Cr Sc x-ray multilayer mirrors for the water window," Opt. Lett. 28, 2494-2496 (2003)

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