Good-quality polycrystalline BaTiO3 thin films are deposited on MgO substrates by pulsed laser deposition. The deposition parameters are optimized to achieve optical-quality films with an attenuation coefficient of 4 dB/cm at the 633-nm wavelength. Thin-film electro-optic Mach–Zehnder modulators are fabricated with standard lithography and ion-beam etching. The waveguides patterned by lithography are the ridge type, and they ensure single-mode propagation in the wavelength range of 633–1550 nm. An electro-optic coefficient of 22 pm/V is estimated for the polycrystalline BaTiO3 films.
© 2003 Optical Society of America
A. Petraru, J. Schubert, M. Schmid, O. Trithaveesak, and Ch. Buchal, "Integrated optical Mach Zehnder modulator based on polycrystalline BaTiO3," Opt. Lett. 28, 2527-2529 (2003)