20-nm-resolution soft x-ray microscopy demonstrated by use of multilayer test structures: erratum
Optics Letters, Vol. 28, Issue 24, pp. 2530-2530 (2003)
http://dx.doi.org/10.1364/OL.28.002530
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Abstract
© 2003 Optical Society of America
OCIS Codes
(110.4980) Imaging systems : Partial coherence in imaging
(180.7460) Microscopy : X-ray microscopy
(340.7460) X-ray optics : X-ray microscopy
Citation
Weilun Chao, Erik Anderson, Gregory P. Denbeaux, Bruce Harteneck, J. Alexander Liddle, Deirdre L. Olynick, Angelic L. Pearson, Farhad Salmassi, ChengYu Song, and David T. Attwood, "20-nm-resolution soft x-ray microscopy demonstrated by use of multilayer test structures: erratum," Opt. Lett. 28, 2530-2530 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-24-2530
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