Investigations of two-photon polymerization of inorganic–organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses are performed. First applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganic–organic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed.
© 2003 Optical Society of America
J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, "Femtosecond laser-induced two-photon polymerization of inorganic organic hybrid materials for applications in photonics," Opt. Lett. 28, 301-303 (2003)