OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 28, Iss. 6 — Mar. 15, 2003
  • pp: 456–458

Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers

Stefan P. Hau-Riege and Daniel G. Stearns  »View Author Affiliations

Optics Letters, Vol. 28, Issue 6, pp. 456-458 (2003)

View Full Text Article

Acrobat PDF (169 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We demonstrate that laser annealing of Mo/Si multilayers can be used to make controlled modifications of the surface figure of an optical substrate on a nanometer scale. In this experiment a superpolished optical flat was exposed to single pulses from an excimer laser to produce surface depressions of widths that varied from 10μm to 0.5 mm and of depths in the range 2–50 nm. Simulations of thermally induced contraction of the Mo/Si multilayers are in good agreement with the observed deformations and indicate that the technique can be extended to larger deformations and higher resolution.

© 2003 Optical Society of America

OCIS Codes
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(340.7470) X-ray optics : X-ray mirrors
(350.3390) Other areas of optics : Laser materials processing

Stefan P. Hau-Riege and Daniel G. Stearns, "Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers," Opt. Lett. 28, 456-458 (2003)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. D. R. Kania, D. P. Gaines, D. S. Sweeney, G. E. Sommargren, B. La Fontaine, S. P. Vernon, D. A. Tichenor, J. E. Bjorkholm, F. Zernike, and R. N. Kestner, J. Vac. Sci. Technol. B 14, 3706 (1996).
  2. J. S. Taylor, J. A. Folta, and C. Montcalm, “Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers,” U.S. patent applied for March 1, 2002.
  3. D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, J. Appl. Phys. 84, 1003 (1998).
  4. D. G. Stearns, M. B. Stearns, Y. Cheng, J. H. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
  5. P. B. Mirkarimi, D. G. Stearns, S. L. Baker, J. W. Elmer, D. W. Sweeney, and E. M. Gullikson, J. Appl. Phys. 91, 81 (2002).
  6. We used the Zygo white-light interferometer fabricated by Zygo Corporation, Middlefield, Conn.
  7. We used the commercial software package FlexPDE developed by PDE Solutions, Inc., Antioch, Calif. (2002).
  8. D. R. Lide, ed., CRC Handbook of Chemistry and Physics, 3rd ed. (CRC Press, Boca Raton, Fla., 2000).
  9. R. S. Rosen, D. G. Stearns, M. A. Viliardos, M. E. Kassner, S. P. Vernon, and Y. Cheng, Appl. Opt. 32, 6975 (1993).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited