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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 28, Iss. 7 — Apr. 1, 2003
  • pp: 528–530

Absolute interferometer for three-dimensional profile measurement of rough surfaces

Byoung-Chang Kim and Seung-Woo Kim  »View Author Affiliations


Optics Letters, Vol. 28, Issue 7, pp. 528-530 (2003)
http://dx.doi.org/10.1364/OL.28.000528


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Abstract

We present a new interferometer system devised for surface-profile metrology with multiple two-point-diffraction sources that are made from a pair of single-mode optical fibers. The diffraction interferometer system performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting the measured phase data into a global model of multilateration. Test measurement results demonstrate that the proposed profiling method is suited for rough surfaces with excessive surface irregularities, which are difficult to measure with conventional two-arm interferometers.

© 2003 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

Citation
Byoung-Chang Kim and Seung-Woo Kim, "Absolute interferometer for three-dimensional profile measurement of rough surfaces," Opt. Lett. 28, 528-530 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-7-528


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