OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 28, Iss. 8 — Apr. 15, 2003
  • pp: 628–630

Electrostatic micromachine scanning mirror for optical coherence tomography

J. M. Zara, S. Yazdanfar, K. D. Rao, J. A. Izatt, and S. W. Smith  »View Author Affiliations


Optics Letters, Vol. 28, Issue 8, pp. 628-630 (2003)
http://dx.doi.org/10.1364/OL.28.000628


View Full Text Article

Acrobat PDF (1006 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.

© 2003 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(120.5800) Instrumentation, measurement, and metrology : Scanners
(170.3880) Medical optics and biotechnology : Medical and biological imaging

Citation
J. M. Zara, S. Yazdanfar, K. D. Rao, J. A. Izatt, and S. W. Smith, "Electrostatic micromachine scanning mirror for optical coherence tomography," Opt. Lett. 28, 628-630 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-8-628

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited