High-quality templates of three-dimensional woodpile photonic crystals are fabricated in photoresist SU-8 by use of femtosecond laser lithography. The samples have smooth surfaces, are mechanically stable, and are resistant to degradation under environmental and chemical influences. Fundamental and higher-order photonic stopgaps are identified in the wavelength range 2.0–8.0μm . These templates can be used for subsequent infiltration by optically active or high-refractive-index materials.
© 2004 Optical Society of America
(160.5470) Materials : Polymers
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(230.4000) Optical devices : Microstructure fabrication
Vygantas Mizeikis, Kock Khuen Seet, Saulius Juodkazis, and Hiroaki Misawa, "Three-dimensional woodpile photonic crystal templates for the infrared spectral range," Opt. Lett. 29, 2061-2063 (2004)