Chromatic confocal microscopy has the advantage of short measurement times because of its parallel depth scan. As most white-light sources have limited optical output power, light-efficient setups are necessary. Using an extended detection pinhole is one way to improve light efficiency. We have calculated the effect of extended pinholes in chromatic confocal setups. We found that, for certain pinhole sizes, the FWHM of the confocal signal is nearly constant over a large wavelength interval.
© 2004 Optical Society of America
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(150.6910) Machine vision : Three-dimensional sensing
(180.1790) Microscopy : Confocal microscopy
(180.6900) Microscopy : Three-dimensional microscopy
A. K. Ruprecht, T. F. Wiesendanger, and H. J. Tiziani, "Chromatic confocal microscopy with a finite pinhole size," Opt. Lett. 29, 2130-2132 (2004)