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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 29, Iss. 21 — Nov. 1, 2004
  • pp: 2479–2481

High-contrast microscopy of semiconductor and metal sites in integrated circuits by detection of optical feedback

Vernon Julius Cemine, Bernardino Buenaobra, Carlo Mar Blanca, and Caesar Saloma  »View Author Affiliations


Optics Letters, Vol. 29, Issue 21, pp. 2479-2481 (2004)
http://dx.doi.org/10.1364/OL.29.002479


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Abstract

High-contrast microscopy of semiconductor and metal sites in integrated circuits is demonstrated with laser-scanning confocal reflectance microscopy, one-photon (1P) optical-beam-induced current (OBIC) imaging, and detection of optical feedback by means of a commercially available semiconductor laser that also acts as an excitation source. The confocal microscope has a compact in-line arrangement with no external photodetector. Confocal and 1P OBIC images are obtained simultaneously from the same focused beam scanned across the sample plane. Image pairs are processed to generate exclusive high-contrast distributions of semiconductor, metal, and dielectric sites in a GaAs photodiode array sample.

© 2004 Optical Society of America

OCIS Codes
(100.6890) Image processing : Three-dimensional image processing
(110.4190) Imaging systems : Multiple imaging
(180.1790) Microscopy : Confocal microscopy

Citation
Vernon Julius Cemine, Bernardino Buenaobra, Carlo Mar Blanca, and Caesar Saloma, "High-contrast microscopy of semiconductor and metal sites in integrated circuits by detection of optical feedback," Opt. Lett. 29, 2479-2481 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-21-2479


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