We report a novel digital-deflection programmable micromirror array driven by micromechanical digital-to-analog converters that eliminates the need for electrical digital-to-analog converters for analog displacement control, thus simplifying the driving circuitry and reducing the overall system cost. Furthermore, owing to the bistable and hysteretic characteristics of parallel-plate electrostatic actuators, an array of micromirrors can be controlled by means of row- and column-addressing lines, which drastically reduce the number of routing wires and allow array sizes to increase while they maintain high array quality.
© 2004 Optical Society of America
Guangya Zhou, Logeeswaran VJ, Fook Siong Chau, and Francis E. H. Tay, "Line-addressable digital-deflection programmable micromirror array," Opt. Lett. 29, 2581-2583 (2004)