Line-addressable digital-deflection programmable micromirror array
Optics Letters, Vol. 29, Issue 22, pp. 2581-2583 (2004)
http://dx.doi.org/10.1364/OL.29.002581
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Abstract
We report a novel digital-deflection programmable micromirror array driven by micromechanical digital-to-analog converters that eliminates the need for electrical digital-to-analog converters for analog displacement control, thus simplifying the driving circuitry and reducing the overall system cost. Furthermore, owing to the bistable and hysteretic characteristics of parallel-plate electrostatic actuators, an array of micromirrors can be controlled by means of row- and column-addressing lines, which drastically reduce the number of routing wires and allow array sizes to increase while they maintain high array quality.
© 2004 Optical Society of America
OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.6120) Optical devices : Spatial light modulators
(350.3950) Other areas of optics : Micro-optics
Citation
Guangya Zhou, Logeeswaran VJ, Fook Siong Chau, and Francis E. H. Tay, "Line-addressable digital-deflection programmable micromirror array," Opt. Lett. 29, 2581-2583 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-22-2581
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