OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 29, Iss. 22 — Nov. 15, 2004
  • pp: 2581–2583

Line-addressable digital-deflection programmable micromirror array

Guangya Zhou, Logeeswaran VJ, Fook Siong Chau, and Francis E. H. Tay  »View Author Affiliations


Optics Letters, Vol. 29, Issue 22, pp. 2581-2583 (2004)
http://dx.doi.org/10.1364/OL.29.002581


View Full Text Article

Acrobat PDF (1915 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report a novel digital-deflection programmable micromirror array driven by micromechanical digital-to-analog converters that eliminates the need for electrical digital-to-analog converters for analog displacement control, thus simplifying the driving circuitry and reducing the overall system cost. Furthermore, owing to the bistable and hysteretic characteristics of parallel-plate electrostatic actuators, an array of micromirrors can be controlled by means of row- and column-addressing lines, which drastically reduce the number of routing wires and allow array sizes to increase while they maintain high array quality.

© 2004 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.6120) Optical devices : Spatial light modulators
(350.3950) Other areas of optics : Micro-optics

Citation
Guangya Zhou, Logeeswaran VJ, Fook Siong Chau, and Francis E. H. Tay, "Line-addressable digital-deflection programmable micromirror array," Opt. Lett. 29, 2581-2583 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-22-2581


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. A. Tuantranont and V. M. Bright, IEEE J. Sel. Top. Quantum Electron. 8, 33 (2002).
  2. D. Koester, A. Cowen, R. Mahadevan, M. Stonefeld, and B. Hardy, “PolyMUMPS design handbook,” http://www.memscap.com/memsrus/svcrules.html.
  3. M. K. Lee, W. D. Cowan, B. M. Welsh, V. M. Bright, and M. C. Roggemann, Opt. Lett. 23, 645 (1998).
  4. Y. Nemirovsky and O. Bochobza-Degani, J. Microelectromechan. Syst. 10, 601 (2001).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited