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Optics Letters

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  • Vol. 29, Iss. 24 — Dec. 15, 2004
  • pp: 2914–2916

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, Jr., and W. R. Hunter  »View Author Affiliations


Optics Letters, Vol. 29, Issue 24, pp. 2914-2916 (2004)
http://dx.doi.org/10.1364/OL.29.002914


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Abstract

We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo2C /Si multilayer coating matched to the grating blaze angle of 2.78°. At an angle of incidence of 5.6° and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.

© 2004 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(310.1620) Thin films : Interference coatings

Citation
M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, Jr., and W. R. Hunter, "Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating," Opt. Lett. 29, 2914-2916 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-24-2914


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References

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