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Optics Letters

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  • Vol. 29, Iss. 5 — Mar. 1, 2004
  • pp: 457–458

Fabrication of an improved gray-scale mask for refractive micro- and meso-optics

Zhou Zhou and Sing H. Lee  »View Author Affiliations


Optics Letters, Vol. 29, Issue 5, pp. 457-458 (2004)
http://dx.doi.org/10.1364/OL.29.000457


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Abstract

An experiment was performed on a new gray-scale mask material. The mask material is carbon based and has high attenuation in the deep ultraviolet spectral range. The experiment involves making a gray-scale mask for an axicon. Preliminary results show that gray-scale profiles of accurate transmittance functions can be fabricated. Potentially, the capability at deep ultraviolet wavelengths will allow the fabrication of high-resolution components. The high-attenuation characteristic will allow the production of microscale and mesoscale optics of more phase levels.

© 2004 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(310.6860) Thin films : Thin films, optical properties
(350.3950) Other areas of optics : Micro-optics

Citation
Zhou Zhou and Sing H. Lee, "Fabrication of an improved gray-scale mask for refractive micro- and meso-optics," Opt. Lett. 29, 457-458 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-5-457


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