Ultrahigh-<i>Q</i> microtoroids on a chip are applied as replication masters to demonstrate replica-molded high-<i>Q</i> microresonator arrays. Replica <i>Q</i> factors are nearly material loss limited, affirming the integrity of the replication process, and are as high as 5×10<sup>6</sup> , or nearly a factor of 40 greater than previous polymer-based devices. Because the molding process is nondestructive, both the master and the molds can be reused. Additionally, by using a novel optical polymer (Vicast), we demonstrate storage of high-<i>Q</i> microresonators in the mold for weeks, providing a method to preserve the whispering-gallery <i>Q</i> factor.
© 2004 Optical Society of America
Andrea L. Martin, Deniz K. Armani, Lan Yang, and Kerry J. Vahala, "Replica-molded high-Q polymer microresonators," Opt. Lett. 29, 533-535 (2004)