Ultrahigh-Q microtoroids on a chip are applied as replication masters to demonstrate replica-molded high-Q microresonator arrays. Replica Q factors are nearly material loss limited, affirming the integrity of the replication process, and are as high as 5×106 , or nearly a factor of 40 greater than previous polymer-based devices. Because the molding process is nondestructive, both the master and the molds can be reused. Additionally, by using a novel optical polymer (Vicast), we demonstrate storage of high-Q microresonators in the mold for weeks, providing a method to preserve the whispering-gallery Q factor.
© 2004 Optical Society of America
Andrea L. Martin, Deniz K. Armani, Lan Yang, and Kerry J. Vahala, "Replica-molded high-Q polymer microresonators," Opt. Lett. 29, 533-535 (2004)