OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 29, Iss. 7 — Apr. 1, 2004
  • pp: 706–708

Micromachined transmissive scanning confocal microscope

Sunghoon Kwon and Luke P. Lee  »View Author Affiliations


Optics Letters, Vol. 29, Issue 7, pp. 706-708 (2004)
http://dx.doi.org/10.1364/OL.29.000706


View Full Text Article

Acrobat PDF (701 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We have developed a miniature scanning confocal microscope that uses electrostatically actuated microlenses for focusing and scanning. Objective lenses, scanners, a pupil, and a pinhole of the confocal microscope are microfabricated and integrated into a volume smaller than 2mm <sup>3</sup> by stacking these components. Objective lenses are composed of two vertically cascaded polymer microlenses integrated into micromachined comb actuators. Raster scanning is implemented by electrostatically actuating each microlens in orthogonal directions. We have demonstrated reflection confocal imaging with 3-mu;m transverse resolution over a 100-μm field of view and a 0.38-mm working distance at λ=633nm .

© 2004 Optical Society of America

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(170.1790) Medical optics and biotechnology : Confocal microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3120) Optical devices : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices
(350.3950) Other areas of optics : Micro-optics

Citation
Sunghoon Kwon and Luke P. Lee, "Micromachined transmissive scanning confocal microscope," Opt. Lett. 29, 706-708 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-7-706


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. D. L. Dickensheets and G. S. Kino, Opt. Lett. 21, 764 (1996).
  2. W. Piyawattanametha, P. R. Patterson, G. D. J. Su, H. Toshiyoshi, and M. C. Wu, in Proceedings of the International Conference on Solid State Sensors and Actuators (Springer-Verlag, Germany, 2001), p. 590.
  3. S. Kwon and L. P. Lee, “Stacked 2D microlens scanners,” submitted to J. Microelect. Syst.
  4. H. Toshiyoshi, G. J. Su, J. LaCosse, and M. C. Wu, J. Lightwave Technol. 21, 1700 (2003).
  5. S. Decai, Y. Ching, and M. Rosa, in IEEE Solid-State Sensor and Actuator and Microsystems Workshop (Transducers Research Foundation, Cleveland, Ohio), p. 259.
  6. C. R. King, L. Y. Lin, and M. C. Wu, IEEE Photon. Technol. Lett. 8, 1349 (1996).
  7. W. J. Smith, Modern Optical Engineering, 3rd ed. (McGraw-Hill, New York, 2000), p. 465.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited