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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 29, Iss. 7 — Apr. 1, 2004
  • pp: 706–708

Micromachined transmissive scanning confocal microscope

Sunghoon Kwon and Luke P. Lee  »View Author Affiliations


Optics Letters, Vol. 29, Issue 7, pp. 706-708 (2004)
http://dx.doi.org/10.1364/OL.29.000706


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Abstract

We have developed a miniature scanning confocal microscope that uses electrostatically actuated microlenses for focusing and scanning. Objective lenses, scanners, a pupil, and a pinhole of the confocal microscope are microfabricated and integrated into a volume smaller than 2mm 3 by stacking these components. Objective lenses are composed of two vertically cascaded polymer microlenses integrated into micromachined comb actuators. Raster scanning is implemented by electrostatically actuating each microlens in orthogonal directions. We have demonstrated reflection confocal imaging with 3-mu;m transverse resolution over a 100-μm field of view and a 0.38-mm working distance at λ=633nm .

© 2004 Optical Society of America

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(170.1790) Medical optics and biotechnology : Confocal microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3120) Optical devices : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices
(350.3950) Other areas of optics : Micro-optics

Citation
Sunghoon Kwon and Luke P. Lee, "Micromachined transmissive scanning confocal microscope," Opt. Lett. 29, 706-708 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-7-706

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