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Optics Letters

Optics Letters


  • Vol. 29, Iss. 7 — Apr. 1, 2004
  • pp: 706–708

Micromachined transmissive scanning confocal microscope

Sunghoon Kwon and Luke P. Lee  »View Author Affiliations

Optics Letters, Vol. 29, Issue 7, pp. 706-708 (2004)

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We have developed a miniature scanning confocal microscope that uses electrostatically actuated microlenses for focusing and scanning. Objective lenses, scanners, a pupil, and a pinhole of the confocal microscope are microfabricated and integrated into a volume smaller than 2mm 3 by stacking these components. Objective lenses are composed of two vertically cascaded polymer microlenses integrated into micromachined comb actuators. Raster scanning is implemented by electrostatically actuating each microlens in orthogonal directions. We have demonstrated reflection confocal imaging with 3-mu;m transverse resolution over a 100-μm field of view and a 0.38-mm working distance at λ=633nm .

© 2004 Optical Society of America

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(170.1790) Medical optics and biotechnology : Confocal microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3120) Optical devices : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices
(350.3950) Other areas of optics : Micro-optics

Sunghoon Kwon and Luke P. Lee, "Micromachined transmissive scanning confocal microscope," Opt. Lett. 29, 706-708 (2004)

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  1. D. L. Dickensheets and G. S. Kino, Opt. Lett. 21, 764 (1996).
  2. W. Piyawattanametha, P. R. Patterson, G. D. J. Su, H. Toshiyoshi, and M. C. Wu, in Proceedings of the International Conference on Solid State Sensors and Actuators (Springer-Verlag, Germany, 2001), p. 590.
  3. S. Kwon and L. P. Lee, “Stacked 2D microlens scanners,” submitted to J. Microelect. Syst.
  4. H. Toshiyoshi, G. J. Su, J. LaCosse, and M. C. Wu, J. Lightwave Technol. 21, 1700 (2003).
  5. S. Decai, Y. Ching, and M. Rosa, in IEEE Solid-State Sensor and Actuator and Microsystems Workshop (Transducers Research Foundation, Cleveland, Ohio), p. 259.
  6. C. R. King, L. Y. Lin, and M. C. Wu, IEEE Photon. Technol. Lett. 8, 1349 (1996).
  7. W. J. Smith, Modern Optical Engineering, 3rd ed. (McGraw-Hill, New York, 2000), p. 465.

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