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Optics Letters

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  • Vol. 29, Iss. 9 — May. 1, 2004
  • pp: 1007–1009

Fabrication of concave refractive microlens arrays in solgel glass by a simple proximity-effect-assisted reflow technique

Miao He, Xiaocong Yuan, Jing Bu, and Wai Chye Cheong  »View Author Affiliations


Optics Letters, Vol. 29, Issue 9, pp. 1007-1009 (2004)
http://dx.doi.org/10.1364/OL.29.001007


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Abstract

We report a simple method for fabricating a concave refractive microlens array (MLA) in solgel glass by using a proximity-effect-assisted reflow technique. The solgel concave refractive MLA that we fabricated had excellent surface smoothness; good dimensional conformity, with an 8.23% nonuniformity of the microlens elements; and structural perfection, with a biggest deviation of 1% from a perfect concave spherical crown. The relative error between the measured and the designed values of the concave MLA’s focal length was only 1.83%. Compared with the conventional fabrication techniques for concave MLAs, the proposed method has significant advantages including simplicity, low cost, good element conformity, and smooth device surface.

© 2004 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication

Citation
Miao He, Xiaocong Yuan, Jing Bu, and Wai Chye Cheong, "Fabrication of concave refractive microlens arrays in solgel glass by a simple proximity-effect-assisted reflow technique," Opt. Lett. 29, 1007-1009 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-9-1007


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