Micro-optical structures for VUV laser beam shaping and wave-front sensing were manufactured by thin-film deposition onto CaF<sub>2</sub> and transfer by etching. Arrays of Bessel-like F<sub>2</sub> laser beams at a wavelength of 157 nm with extremely small conical angles were generated by microaxicon lenses. Beam propagation was studied in simulations and experiments. Apodization by absorbing layers is proposed for beam cleaning.
© 2004 Optical Society of America
(010.7350) Atmospheric and oceanic optics : Wave-front sensing
(140.3300) Lasers and laser optics : Laser beam shaping
(260.7200) Physical optics : Ultraviolet, extreme
(310.0310) Thin films : Thin films
(350.3950) Other areas of optics : Micro-optics
R. Grunwald, U. Neumann, V. Kebbel, H.-J. Kühn, K. Mann, U. Leinhos, H. Mischke, and D. Wulff-Molder, "Vacuum-ultraviolet beam array generation by flat micro-optical structures," Opt. Lett. 29, 977-979 (2004)