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Low-loss silica-on-silicon two-dimensional Fabry–Perot cavity based on holographic Bragg reflectors

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Abstract

We report on the demonstration of an integrated slab-waveguide-based concentric Fabry–Perot resonator that employs holographic Bragg reflectors as cavity mirrors. The cavity, produced in a low-loss silica-on-silicon slab waveguide by high-fidelity deep-ultraviolet photolithographic fabrication, exhibits a reflectivity-limited Q factor of approximately 105. Increasing the mirror’s reflectivity will provide Q values similar to those of silica-based ring resonators, whereas the folded Fabry–Perot resonator design allows access to a substantially larger free spectral range by cavity shortening.

© 2005 Optical Society of America

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