Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.
© 2005 Optical Society of America
G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, "Nanoimaging with a compact extreme-ultraviolet laser," Opt. Lett. 30, 2095-2097 (2005)