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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Anthony J. Campillo
  • Vol. 30, Iss. 19 — Oct. 1, 2005
  • pp: 2650–2652

Femtosecond laser pulses for surface-profile metrology

Jeong Seok Oh and Seung-Woo Kim  »View Author Affiliations


Optics Letters, Vol. 30, Issue 19, pp. 2650-2652 (2005)
http://dx.doi.org/10.1364/OL.30.002650


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Abstract

We discuss two ways to use femtosecond pulsed lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultrafast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light, to be performed. Second, the high spatial coherence of femtosecond pulsed lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally with Fizeau and Twyman-Green type scanning interferometers.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(140.7090) Lasers and laser optics : Ultrafast lasers

ToC Category:
Ultrafast Optics

Citation
Jeong Seok Oh and Seung-Woo Kim, "Femtosecond laser pulses for surface-profile metrology," Opt. Lett. 30, 2650-2652 (2005)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-19-2650

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