OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Anthony J. Campillo
  • Vol. 30, Iss. 20 — Oct. 15, 2005
  • pp: 2730–2732

157 nm F2-laser writing of silica optical waveguides in silicone rubber

Masayuki Okoshi, Jianzhao Li, and Peter R. Herman  »View Author Affiliations


Optics Letters, Vol. 30, Issue 20, pp. 2730-2732 (2005)
http://dx.doi.org/10.1364/OL.30.002730


View Full Text Article

Acrobat PDF (379 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Silica (SiO2) optical waveguides have been fabricated on the surface of silicone [(SiO(CH3)2)n] rubber by photochemical modification of silicone rubber into silica with 157 nmF2-laser radiation. The 2 mm thick silicone was exposed through a thin (∼0.2 mm) air layer to generate oxygen radicals that chemically assisted in the silica transformation. Silica waveguides were defined in 8-16 µm wide exposure strips by a proximity Cr-on-CaF2 photomask. Optimum laser processing conditions are presented for generating crack-free waveguides with good optical transparency at red (635 nm) and infrared (1550 nm) wavelengths. A propagation loss of ∼6 dB/cm is reported at the 1550 nm wavelength.

© 2005 Optical Society of America

OCIS Codes
(160.5470) Materials : Polymers
(160.6030) Materials : Silica
(220.4610) Optical design and fabrication : Optical fabrication
(230.7370) Optical devices : Waveguides
(240.6670) Optics at surfaces : Surface photochemistry

ToC Category:
Integrated Optics

Citation
Masayuki Okoshi, Jianzhao Li, and Peter R. Herman, "157 nm F2-laser writing of silica optical waveguides in silicone rubber," Opt. Lett. 30, 2730-2732 (2005)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-20-2730


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature 432, 488 (2004). [CrossRef]
  2. M. Okoshi, M. Kuramatsu, and N. Inoue, Jpn. J. Appl. Phys. Part 1 41, 5602 (2002). [CrossRef]
  3. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, Opt. Lett. 21, 1729 (1996).
  4. P. R. Herman, K. P. Chen, P. Corkum, A. Naumov, S. Ng, and J. Zhang, Proc. SPIE 4088, 345 (2000).
  5. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997). [CrossRef]
  6. D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Hermann, and E. E. B. Cambell, Appl. Phys. Lett. 72, 1442 (1998). [CrossRef]
  7. H. Takao, M. Okoshi, and N. Inoue, Jpn. J. Appl. Phys. Part 1 41, L1088 (2002).
  8. M. Okoshi, T. Kimura, H. Takao, N. Inoue, and T. Yamashita, Jpn. J. Appl. Phys. Part 1 43, 3438 (2004).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited