We report the fabrication of three-dimensional structures of submicrometer resolution by three-photon polymerization. This resolution has been achieved by polymerizing ORMOCER, a UV photocurable organic-inorganic hybrid material, with an ultrafast laser irradiation at 1028 nm. To our knowledge, this is the first demonstration of three-photon polymerization, a process that may allow the fabrication of components of very high resolution.
© 2005 Optical Society of America
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.5470) Materials : Polymers
(220.4000) Optical design and fabrication : Microstructure fabrication
(270.4180) Quantum optics : Multiphoton processes
Optical Design and Fabrication
M. Farsari, G. Filippidis, and C. Fotakis, "Fabrication of three-dimensional structures by three-photon polymerization," Opt. Lett. 30, 3180-3182 (2005)