OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Anthony J. Campillo
  • Vol. 30, Iss. 24 — Dec. 15, 2005
  • pp: 3269–3271

Miniature all-silica fiber optic pressure and acoustic sensors

Juncheng Xu, Xingwei Wang, Kristie L. Cooper, and Anbo Wang  »View Author Affiliations

Optics Letters, Vol. 30, Issue 24, pp. 3269-3271 (2005)

View Full Text Article

Acrobat PDF (103 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We present a miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only ∼0.32mm in diameter. By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor measurement range from 5 to 10,000 psi (1psi=51.72Torr) and a frequency response up to 2 MHz. In addition, the sensor's F-P cavity can be set from micrometers to millimeters with a precision of several nanometers. With the all-silica structure, the sensor is reliable, biocompatible, and immune to electromagnetic interference and has high-temperature sensing capability.

© 2005 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Fiber Optics and Optical Communications

Virtual Issues
Vol. 1, Iss. 1 Virtual Journal for Biomedical Optics

Juncheng Xu, Xingwei Wang, Kristie L. Cooper, and Anbo Wang, "Miniature all-silica fiber optic pressure and acoustic sensors," Opt. Lett. 30, 3269-3271 (2005)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. B. Yu, D. W. Kim, J. Deng, H. Xiao, and A. Wang, Appl. Opt. 42, 3241 (2003).
  2. J. Xu, G. Pickrell, X. Wang, W. Peng, K. L Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005). [CrossRef]
  3. E. Cibula, D. Donlagic, and C. Stropnik, in Sensors; 2002 Proceedings (Institute of Electrical and Electronics Engineers, 2002), Vol. 1, p. 711.
  4. K. Totsu, Y. Haga, and M. Esashi, in Transducers, Solid-State Sensors, Actuators and Microsystems, (2003), Vol. 1, p. 931.
  5. Y. Zhu and A. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005). [CrossRef]
  6. X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, 'All-fused-silica miniature optical fiber tip pressure sensor,' Opt. Lett. (to be published).
  7. M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).
  8. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, IEEE Photon. Technol. Lett. 13, 993 (2001). [CrossRef]
  9. M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, IEEE Sens. J. 3, 102 (2003).
  10. J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, Opt. Eng. 40, 598 (2001). [CrossRef]
  11. J. Xu, G. R. Pickrell, K. L Cooper, P. Zhang, and A. Wang, presented at Conference on Lasers and Electro-Optics (CLEO 05), (Optical Society of America, 2005), paper CThL5.
  12. A. Wang, H. Xiao, J. Wang, Z. Wang, W. Zhao, and R. G. May, J. Lightwave Technol. 19, 1495 (2001). [CrossRef]
  13. J. Xu, G. R. Pickrell, Z. Huang, B. Qi, P. Zhang, Y. Duan, and A. Wang, AIP Conf. Proc. 684, 1021 (2003). [CrossRef]
  14. B. Qi, G. R. Pickrell, J. Xu, P. Zhang, Y. Duan, W. Peng, Z. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, Opt. Eng. 42, 3165 (2003). [CrossRef]
  15. F. Shen, W. Peng, K. Cooper, G. Pickrell, and A. Wang, Proc. SPIE 5590, 47 (2004).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited